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spring beam 大桁,系梁。

spring beauty

The effect of the parameter of the spring beam on resonant frequency , sensitivity , cross sensitivity of the structure of the accelerometer , the effect of the electrostatic force on the accelerometer , the dynamic performance of the accelerometer are analyzed 論文采用了一種新的建模仿真法,即原理級描述仿真法,建立了叉指式微加速度計的參數化機電混合系統模型,對其進行分析研究。