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helicon n.1.【希臘神話】(文藝九女神 Muses 住的)赫利...

heliconia

Hydrogenated amorphous silicon nitride ( a - sinx : h ) films have been deposited by helicon wave plasma enhanced chemical vapor deposition ( hwp - cvd ) , the effect of sih4 / n2 rate on the properties of the samples is systematically studied , and the critical experiment condition is obtained under which a - sinx : h films with different compositions are deposited 本工作采用螺旋波等離子體化學氣相沉積( hwp - cvd )方法制備了氫化非晶氮化硅( a - sin _ x : h )薄膜,系統地研究了不同反應氣體配比對薄膜特性的影響,得到了沉積不同組分a - sin _ x : h的典型實驗條件。

Experimental studies of helicon plasma 螺旋波等離子體的實驗研究